Discharge of heavy noble gases induced by pulsed gyrotron radiation with 1 THz frequency
نویسندگان
چکیده
In this work, gas discharge ignited by girotron radiation with frequency 1 THz was carried out. Breakdown curves were calculated both for selfignited and initiated discharges. There shown that in a case of breakdown the pulse duration longer than several microseconds electric field threshold is same as continuous wave breakdown. Also, possibility using terahertz gyrotron source targets on installations extreme ultraviolet photolithography assessed. Keywords: girotron, breakdown, lithography.
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ژورنال
عنوان ژورنال: Pis?ma v Žurnal tehni?eskoj fiziki
سال: 2023
ISSN: ['1726-7471', '0320-0116']
DOI: https://doi.org/10.21883/tpl.2023.03.55691.19445